Equipment

Characterization and test

NanoLab has equipment for structural, compositional and optical characterization, topographic imaging and electrical testing.

Fabrication

We have equipment for thin film deposition; Chemical Vapour Deposition (CVD) and Physical Vapour Deposition (PVD) and equipment for etching, both wet and dry (Reactive Ion Etching, RIE).

Lithography

We have equipment for lithography with optical, electron beam and focused ion beam.

Contact Nanolab

For further information and enquiries regarding collaborations please contact

Managing Consultant
Mette Herold-Jensen
45 9940 9231
nanolab@nano.aau.dk